The fabrication and characterization of the real-time dust monitoring cantilever sensor

초록

We fabricated the cantilever sensor for highly sensitive dust monitoring by using electrostatic force. The cantilever`s dimension was 700 ?m × 100 ?m × 8.6 ?m and a 1 mm × 1 mm × 8.6 ?m paddle was added to the end of the cantilever for improvement of sensitivity. When the applying voltage was increasing, the saturation of the phase change increased from 0.4 ˚at 30 %RH to 0.6 ˚at 50 %RH for the small-sized dust particles, and the bigger-sized dust particles were hardly attached and detached at 50 %RH. The phase change was increased by 0.2 ˚/min, 20 % of the dust particles were still attached though the twice higher negative voltage was applied at 50 %RH.