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Characteristics of silicon oxy-carbide depositied by RPALD using OMCTS

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제목
Characteristics of silicon oxy-carbide depositied by RPALD using OMCTS
저자
전형탁
발행일
2016-05-20
학회명
2016년도 한국재료학회 춘계학술대회
개최지
여수, 대한민국

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