Super Fine CeO 2 Abrasives Having 4 nm in Diameter Synthesized Via Oxidation Reaction Between Trivalent Cerium and H 2 O 2

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Super Fine CeO 2 Abrasives Having 4 nm in Diameter Synthesized Via Oxidation Reaction Between Trivalent Cerium and H 2 O 2
저자
박재근
발행일
2023-11-22
학회명
Korean international semiconductor conference on manufactureing technology 2023
개최지
부산