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Interface and Passivation Effect on Subthreshold Transport of Carbon Nanotube Network Transistor by Plasma Enhanced Chemical Vapor Deposition
초록
Effects on subthre-shold transport by the types of gate dielectric and passiva-tion are systematically presented for transistors with the random network of nanotubes which were grown by the PECVD
- 제목
- Interface and Passivation Effect on Subthreshold Transport of Carbon Nanotube Network Transistor by Plasma Enhanced Chemical Vapor Deposition
- 저자
- 박완준
- 발행일
- 2009-10-07
- 학회명
- 2009 International Conference on Solid State Devices and Materials
- 개최지
- 센다이, 일본