Interface and Passivation Effect on Subthreshold Transport of Carbon Nanotube Network Transistor by Plasma Enhanced Chemical Vapor Deposition

초록

Effects on subthre-shold transport by the types of gate dielectric and passiva-tion are systematically presented for transistors with the random network of nanotubes which were grown by the PECVD

제목
Interface and Passivation Effect on Subthreshold Transport of Carbon Nanotube Network Transistor by Plasma Enhanced Chemical Vapor Deposition
저자
박완준
발행일
2009-10-07
학회명
2009 International Conference on Solid State Devices and Materials
개최지
센다이, 일본