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Enhancing Hydrogen-Resistance and Stability in IGZO-TFTs using Al2O3 Gate Insulators with N2O Plasma Reactant
- 제목
- Enhancing Hydrogen-Resistance and Stability in IGZO-TFTs using Al2O3 Gate Insulators with N2O Plasma Reactant
- 저자
- 박진성
- 발행일
- 2024-08-21
- 학회명
- IMID 2024
- 개최지
- ICC Jeju, Jeju, Korea