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Fabrication and characterization of WSi2 nanocrystals memory device with SiO2/HfO2/Al2O3 tunnel layers

  • 김은규
제목
Fabrication and characterization of WSi2 nanocrystals memory device with SiO2/HfO2/Al2O3 tunnel layers
저자
김은규
발행일
2011-02-17
학회명
제40회 한국진공학회 동계학술대회
개최지
휘닉스파크

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