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Effect of Surfactant Molecular Weight and Concentration on Surface Quality for Final Polishing of Silicon Wafer
- 제목
- Effect of Surfactant Molecular Weight and Concentration on Surface Quality for Final Polishing of Silicon Wafer
- 저자
- 백운규
- 발행일
- 2009-12-11
- 학회명
- The 6th International Conference on Advanced Material and Device on Advanced Material and Device
- 개최지
- Jeju, Korea