The Influence of Nano-Si Thickness and Ge Concentration on Self-heating Effect in Sub-60 nm Ultra-thin Body Silicon-on-insulator and Strained Si SiGe-on-insulator n-MOSFETs

  • 박재근
제목
The Influence of Nano-Si Thickness and Ge Concentration on Self-heating Effect in Sub-60 nm Ultra-thin Body Silicon-on-insulator and Strained Si SiGe-on-insulator n-MOSFETs
저자
박재근
발행일
2007-04-20
학회명
한국물리학회 2007년 봄 학술발표회
개최지
휘닉스파크