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Low Reflectivity 35-nm of Ru-Pt alloys EUV mask Absorber via Co-Sputtering Method

  • 박재근
제목
Low Reflectivity 35-nm of Ru-Pt alloys EUV mask Absorber via Co-Sputtering Method
저자
박재근
발행일
2023-04-19
학회명
2023 한국물리학회
개최지
대전 컨벤션 센터

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