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Exploring Atomic Layer Etching Behavior Differences in ZnO Crystallographic Planes and Surface Energy Analysis via DFT
- 제목
- Exploring Atomic Layer Etching Behavior Differences in ZnO Crystallographic Planes and Surface Energy Analysis via DFT
- 저자
- 박진성
- 발행일
- 2025-06-23
- 학회명
- ALD/ALE 2025
- 개최지
- ICC JEJU