Effect of Nanoscale Multilayered Structurization on Hardness and Wear Resistance in Al-Cr-N Coating System

초록

In this study, the effect of nanoscale multilayer structurization on the hardness and wear resistance of Al-Cr-N coatings has been investigated. The multilayered and mixed single layered structure of Al-Cr-N coatings with various residual stress values were prepared by changing rotation speed of the substrate holder and sputtering gas pressure. The change in hardness and wear resistance of the Al-Cr-N coating was checked in terms of residual stress induced in the coating.