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HIGH SELECTIVE NANO CERIA SLURRY:ABRASIVE SIZE AND SURFACTANT EFFECTS

  • 박재근
제목
HIGH SELECTIVE NANO CERIA SLURRY:ABRASIVE SIZE AND SURFACTANT EFFECTS
저자
박재근
발행일
2003-07-16
학회명
SEMICON WEST 2003 STS 111:INNOVATIONS IN PLANARIZATION TECHNOLOGY
개최지
SAN FRANSISCO, USA

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