Remarkable Stability Improvement of High Performance PEALD IZO/IGZO Top Gate Thin Film Transistor via Nano Scale Thickness Control

제목
Remarkable Stability Improvement of High Performance PEALD IZO/IGZO Top Gate Thin Film Transistor via Nano Scale Thickness Control
저자
박진성
발행일
2022-08-25
학회명
IMID 2022