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Remarkable Stability Improvement of High Performance PEALD IZO/IGZO Top Gate Thin Film Transistor via Nano Scale Thickness Control
- 제목
- Remarkable Stability Improvement of High Performance PEALD IZO/IGZO Top Gate Thin Film Transistor via Nano Scale Thickness Control
- 저자
- 박진성
- 발행일
- 2022-08-25
- 학회명
- IMID 2022