ScholarWorks@한양대학교

상세 보기

A Study on Synthesis and Dispersion Stability of Nano CeO2 for STI CMP Process

  • 박재근
제목
A Study on Synthesis and Dispersion Stability of Nano CeO2 for STI CMP Process
저자
박재근
발행일
2001-10-19
학회명
2001 한국세라믹학회 추계총회 및 연구발표회 초록집
개최지
한국과학기술원(KOREA)

ScholarWorks@한양대학교

(04763) 서울특별시 성동구 왕십리로 222 Tel. +82-2-2220-1370 +82-2-2220-1366

COPYRIGHT © 한양대학교 All Rights Reserved.

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.

You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.