시스템 변수 불확실성을 고려한 MEMS 가속도 센서 설계

초록

Each system parameter of a MEMS accelerometer has uncertainty caused by manufacturing tolerances. The system parameter uncertainty has influences on performance variations of the entire system. Therefore, the system parameter uncertainty needs to be considered during a MEMS accelerometer design process. In this paper, uncertainty of system parameters including squeeze film damping is analyzed and a design process consisting of modeling, analysis and design is proposed. Manufacturing error rates of a MEMS accelerometer in terms of system parameter uncertainty are predictable through the process. As performances of MEMS accelerometers, sensitivity and measurable frequency range (MFR) are defined. FORM is employed to analyze uncertainty.

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