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Plasma effect of HfO2 Thin Film Deposited by O2 and O2+Ar Mixed lasma-Enhanced Atomic Layer Deposition (PEALD)

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Plasma effect of HfO2 Thin Film Deposited by O2 and O2+Ar Mixed lasma-Enhanced Atomic Layer Deposition (PEALD)
저자
전형탁
발행일
2006-09-13
학회명
IUMRS International Conference in Asia 2006 (IUMRS-ICA-2006) meeting
개최지
Hotel Shilla, Jeju

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