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In-Situ ALD Fabrication of Heterogeneous Gate Insulators for Improved Reliability in High-Mobility IGZO Transistors
- 제목
- In-Situ ALD Fabrication of Heterogeneous Gate Insulators for Improved Reliability in High-Mobility IGZO Transistors
- 저자
- 박진성
- 발행일
- 2024-08-06
- 학회명
- ALD/ALE 2024
- 개최지
- Messukeskus in Helsinki, Finland