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Tailoring Crystal and Electrical Characteristics of Indium Oxide via Oxygen Reactants and Substrate Temperature Control in Atomic Layer Deposition

제목
Tailoring Crystal and Electrical Characteristics of Indium Oxide via Oxygen Reactants and Substrate Temperature Control in Atomic Layer Deposition
저자
박진성
발행일
2024-08-05
학회명
ALD/ALE 2024
개최지
Messukeskus in Helsinki, Finland

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