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The incident angle effect of al adatom on the growth morphology of Al/Ni(001) system: Molecular dynamics simulation
- Lee, Soon-gun;
- Chung, Yong Chae
Citations
SCOPUS
0초록
The deposition behavior of Al atoms on Ni(001) substrate for various adatom incident angle and incident energy is investigated in this study using molecular dynamics simulation to investigate the growth morphology and the quality of thin film in atomic level. Results show that the surface roughness is comparatively decreased irrespective of adatom incident angle at the incident energy of 6 eV.
키워드
Surface morphology; Rough surfaces; Surface roughness; Atomic layer deposition; Substrates; Acceleration; Atomic measurements; Sputtering; Ceramics; Power engineering and energy
- 제목
- The incident angle effect of al adatom on the growth morphology of Al/Ni(001) system: Molecular dynamics simulation
- 저자
- Lee, Soon-gun; Chung, Yong Chae
- 발행일
- 2006-05
- 유형
- Conference Paper
- 저널명
- INTERMAG 2006 - IEEE International Magnetics Conference
- 페이지
- 167 ~ 167