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Spectral analysis of the impact of silicon wafer nanotopography on oxide chemical mechanical polishing of shallow trench isolation

  • 박재근
제목
Spectral analysis of the impact of silicon wafer nanotopography on oxide chemical mechanical polishing of shallow trench isolation
저자
박재근
발행일
2005-10-13
학회명
2005 SiWEDS 추계 Meeting
개최지
서울 한양대학교

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