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Effect of Nano-Ceria Grain Size and Slurry pH on Secondary Particle Distribution and Removal Rate in STI CMP

  • 박재근
제목
Effect of Nano-Ceria Grain Size and Slurry pH on Secondary Particle Distribution and Removal Rate in STI CMP
저자
박재근
발행일
2005-04-22
학회명
한국물리학회
개최지
이화여자대학교

ScholarWorks@한양대학교

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