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Effect of Electro-kinetic Surfactant on Surface Roughness for Silicon Etching using NaOH

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Effect of Electro-kinetic Surfactant on Surface Roughness for Silicon Etching using NaOH
저자
박재근
발행일
2005-04-22
학회명
한국물리학회
개최지
이화여자대학교

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