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Effect of Alkaline Agent with Organic Additive in Colloidal Silica Slurry on Polishing Rate Selectivity of Poly-Si to Oxide in Poly-Si CMP
- 제목
- Effect of Alkaline Agent with Organic Additive in Colloidal Silica Slurry on Polishing Rate Selectivity of Poly-Si to Oxide in Poly-Si CMP
- 저자
- 백운규
- 발행일
- 2008-05-20
- 학회명
- 213th ECS Meeting
- 개최지
- Phoenix Covention Center(USA)