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Chemical Mechanical Polishing for Formation of Top Electrode in Spin-Transfer Torque Magnetoresistance Random Access Memory

  • 박재근
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Chemical Mechanical Polishing for Formation of Top Electrode in Spin-Transfer Torque Magnetoresistance Random Access Memory
저자
박재근
발행일
2010-11-16
학회명
ICPT 2010
개최지
USA/ Arizona Biltmore Resort & Spa

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