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Investigation of high-k binary mask for high-NA EUV: mitigating focus-induced NILS and LCDU variations
- 제목
- Investigation of high-k binary mask for high-NA EUV: mitigating focus-induced NILS and LCDU variations
- 저자
- 안진호
- 발행일
- 2025-01-17
- 학회명
- nano convergence conference 2025
- 개최지
- 대전