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Electrical Characteristics of Inductively Coupled Plasma Sources using Magnetic Resonance Wireless Power Transmission System

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Electrical Characteristics of Inductively Coupled Plasma Sources using Magnetic Resonance Wireless Power Transmission System
저자
김주호
발행일
2020-08-20
학회명
THE 59th SUMMER ANNUAL CONFERENCE OF THE KOREAN VACUUM SOCIETY
개최지
소노캄(제주)

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