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Effect of organic particles as abrasives on the surface roughness of silicon wafer surface in final polishing of silicon wafer

  • 박재근
제목
Effect of organic particles as abrasives on the surface roughness of silicon wafer surface in final polishing of silicon wafer
저자
박재근
발행일
2005-06-14
학회명
International Conference on Electroceramic 2005
개최지
kist

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