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Design of Extremely Proximity Gettering using MeV-nitrogen Ion Implantation for Si C-MOS Image Sensor

  • 박재근
제목
Design of Extremely Proximity Gettering using MeV-nitrogen Ion Implantation for Si C-MOS Image Sensor
저자
박재근
발행일
2013-05-31
학회명
2013 SiWEDS Spring Meeting
개최지
The University of Texas at Dallas

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