Remarkable Productivity and Performance of Flexible Indium Zinc Oxide Thin Film Transistors through Composition Engineering via Atmospheric Pressure Spatial Atomic Layer Deposition

제목
Remarkable Productivity and Performance of Flexible Indium Zinc Oxide Thin Film Transistors through Composition Engineering via Atmospheric Pressure Spatial Atomic Layer Deposition
저자
박진성
발행일
2024-08-06
학회명
ALD/ALE 2024
개최지
Messukeskus in Helsinki, Finland