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High Throughput and Performance InZnAlO Thin Film Transistor on Polyimide Substrate via Atmospheric Pressure Spatial Atomic Layer Deposition

제목
High Throughput and Performance InZnAlO Thin Film Transistor on Polyimide Substrate via Atmospheric Pressure Spatial Atomic Layer Deposition
저자
박진성
발행일
2024-08-21
학회명
IMID 2024
개최지
ICC Jeju, Jeju, Korea

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