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Remarkable stability and hydrogen resistance on high-mobility oxide TFTs via N2O plasma reactant in atomic layer deposition
- 제목
- Remarkable stability and hydrogen resistance on high-mobility oxide TFTs via N2O plasma reactant in atomic layer deposition
- 저자
- 박진성
- 발행일
- 2025-06-25
- 학회명
- ALD/ALE 2025
- 개최지
- ICC JEJU