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Impacts of Deposition Temperatures on Insulation Properties of Atmospheric Pressure Spatial ALD Al2O3 Thin Films for Flexible PEALD IGZO TFT

제목
Impacts of Deposition Temperatures on Insulation Properties of Atmospheric Pressure Spatial ALD Al2O3 Thin Films for Flexible PEALD IGZO TFT
저자
박진성
발행일
2022-06-28
학회명
ALD 2022

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