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- 제목
- Design of Extreme Proximity Gettering for Advanced Semiconductor Devices Beyond 3X nm Technology - Understanding the dependency of Cu decoration on crystalline nature after device heat-treatment of 3X technology
- 저자
- 박재근
- 발행일
- 2011-05-18
- 학회명
- 2011 SiWEDS Spring Meeting
- 개최지
- University of Washington UW Tower