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- 제목
- Polystyrene-sulfonate Surfactant Effect on Tungsten-film Chemical-mechanical-polishing Properties Improvement in Buried-tungsten-gate Formation of 1X-nm DRAM
- 저자
- 박재근
- 발행일
- 2017-11-22
- 학회명
- 7th International Symposium for Advanced Functional Materials & Devices
- 개최지
- SUMCO Kyushu Factory (Imari)