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Study on the Mechanism of High selective of Nano Ceria Slurry for Shallow Trench Isolation Chemical Mechanical Polishing

  • 박재근
제목
Study on the Mechanism of High selective of Nano Ceria Slurry for Shallow Trench Isolation Chemical Mechanical Polishing
저자
박재근
발행일
2003-04-25
학회명
2003 spring meeting of Korean Physical Society
개최지
연세대학교

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