Metal-Insulator-Metal Capacitors Using Atomic Layer Deposited Al2O3 and HfO2 Dielectrics

제목
Metal-Insulator-Metal Capacitors Using Atomic Layer Deposited Al2O3 and HfO2 Dielectrics
저자
안진호
발행일
2008-10-18
학회명
PRIME Meeting on Electrochemical and Solid-State Science
개최지
USA