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Tuning of Effective work function in Cl free TiAlN ALD through fine Al doping process for Gate electrode application
- 제목
- Tuning of Effective work function in Cl free TiAlN ALD through fine Al doping process for Gate electrode application
- 저자
- 박진성
- 발행일
- 2025-06-24
- 학회명
- ALD/ALE 2025
- 개최지
- ICC JEJU