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Sputter Induced Compositional Modulation in Co-Cu alloy due to Atomistic Rearrangement: Molecular Dynamics Simulation
- 제목
- Sputter Induced Compositional Modulation in Co-Cu alloy due to Atomistic Rearrangement: Molecular Dynamics Simulation
- 저자
- 정용재
- 발행일
- 2008-08-18
- 학회명
- Microelectronic and Plasma Technology
- 개최지
- Jeju, Korea