Optical Properties of Molybdenum Oxide Thin Films Deposited by Chemical Vapor Transport of MoO3(OH)2

초록

Mo03 thin films have been extensively investigated in the electrochromic (EC) device field due to its superior optical properties electrochromism is simply defined as a color change caused by an applied bias. Recently, many deposition techniques to deposit Mo oxide thin films have been developed including chemical vapor deposition (CVD), evaporation, sol-gel coating. RF magnetron sputtering, and pulsed laser deposition (PLD). ln this study,MoO2 thin films was homogeneously deposited by the chemical vapor transport (CVT) of Mo03(OH)2 during reduction of Mo03 powder in H2. Subsequently, the Mo03 thin film was obtained by annealing ofthe deposited Mo02 at 400oC for various holding times in 02. As annealing commenced, the optical transmittance of the films increased due to the crystallinity resulting from phase change and subsequent reduced oxygen vacancy.