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Properties of ultra-thin hafnium oxide and interfacial layer deposited by atomic layer deposition
- 제목
- Properties of ultra-thin hafnium oxide and interfacial layer deposited by atomic layer deposition
- 저자
- 안진호
- 발행일
- 2004-08-03
- 학회명
- The 8th China-Korea Workshop on Advanced Materials
- 개최지
- Chengdu, China