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Electrical Characteristics of Ir/Atomic Layer Deposited ZrO2/Si field effect transistors

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Electrical Characteristics of Ir/Atomic Layer Deposited ZrO2/Si field effect transistors
저자
전형탁
발행일
2002-12-02
학회명
2002 MRS Fall meeting
개최지
Hynes Convention Center & Sheraton Boston Hotel and Towers , Boston Massachusetts

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