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Synthesis of Low-k SiCNO Thin Films by Plasma-enhanced Atomic-molecular Layer Deposition with Tetra-isocyanate-silane (TICS) and Phloroglucinol (Phl)
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- Synthesis of Low-k SiCNO Thin Films by Plasma-enhanced Atomic-molecular Layer Deposition with Tetra-isocyanate-silane (TICS) and Phloroglucinol (Phl)
- 저자
- 박진성
- 발행일
- 2023-07-28
- 학회명
- ALD 2023
- 개최지
- Los angeles