Remarkable Productivity and Performance of OLED Encapsulation through Growth Dynamics Control via Atmospheric Pressure Spatial Atomic Layer Deposition

제목
Remarkable Productivity and Performance of OLED Encapsulation through Growth Dynamics Control via Atmospheric Pressure Spatial Atomic Layer Deposition
저자
박진성
발행일
2025-06-25
학회명
ALD/ALE 2025
개최지
ICC JEJU