First-Principles calculation: Initial adsorption process of Si/Mo (110) interface for EUV reflector

제목
First-Principles calculation: Initial adsorption process of Si/Mo (110) interface for EUV reflector
저자
정용재
발행일
2003-11-10
학회명
The 2nd Asian international symposium on the science of engineering ceramics
개최지
Aichi, Japan