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First-Principles calculation: Initial adsorption process of Si/Mo (110) interface for EUV reflector
- 제목
- First-Principles calculation: Initial adsorption process of Si/Mo (110) interface for EUV reflector
- 저자
- 정용재
- 발행일
- 2003-11-10
- 학회명
- The 2nd Asian international symposium on the science of engineering ceramics
- 개최지
- Aichi, Japan