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Calculation of the Optical Constants Using X-ray Reflectometer for Verifying the Optical Design of the Attenuated Phase Shift Mask
- 제목
- Calculation of the Optical Constants Using X-ray Reflectometer for Verifying the Optical Design of the Attenuated Phase Shift Mask
- 저자
- 안진호
- 발행일
- 2013-06-10
- 학회명
- 2013 International Workshop on EUV Lithography
- 개최지
- 미국