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Influence of crystal nature on gettering efficiency of transition metal, such as Fe and Ni, in CZ silicon wafer

  • 박재근
제목
Influence of crystal nature on gettering efficiency of transition metal, such as Fe and Ni, in CZ silicon wafer
저자
박재근
발행일
2002-04-19
학회명
춘계한국물리학회
개최지
부산 BEXCO

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