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Electrical characteristics of WSi2 nanocrystals capacitor with barrier engineered high-k tunnel layers

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Electrical characteristics of WSi2 nanocrystals capacitor with barrier engineered high-k tunnel layers
저자
김은규
발행일
2010-11-10
학회명
23rd Inter. Microprocesses and Nanotechnology Conf.(MNC2010)
개최지
Fukuoka, Japan

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