상세 보기
Growth mechanism and gas diffusion barrier property of homogeneously mixed silicon-tim oxide by atomic layer deposition
- 제목
- Growth mechanism and gas diffusion barrier property of homogeneously mixed silicon-tim oxide by atomic layer deposition
- 저자
- 박진성
- 발행일
- 2022-05-27
- 학회명
- 2022년 반도체디스플레이기술학회 춘계학술대회