A study on the E-H mode transition with the line integrated He 23S metastable atom density in an inductively coupled plasma

초록

Helium (He) inductively coupled plasma (ICP) was generated by a right-helical-type RF antenna. At a fixed He pressure of 20 mTorr, the optical emission spectrum from the He plasma was measured with RF power. The E-H mode transition and the characteristic hysteresis of the mode transition were confirmed by a change in the spectral line intensity of the 33D−23P transition at 587.6 nm. By laser absorption spectroscopy using a laser light with a wavelength of 1083 nm resonant to the 23S→23P absorption transition, the line-integrated He 23S metastable density was measured and found to show consistent behavior with the spectral line intensity of the 33D−23P transition during the E-H mode transition. The line-integrated He 23S metastable atom density exhibited distinctly different longitudinal distributions in the E and H modes. © 2021 Korean Physical Society

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