ScholarWorks@한양대학교

상세 보기

Role of H2O2 as oxidizer on the Ge-doped SbTe film for Chemical Mechanical polishing

  • 박재근
제목
Role of H2O2 as oxidizer on the Ge-doped SbTe film for Chemical Mechanical polishing
저자
박재근
발행일
2012-11-09
학회명
한국재료학회 2012년도 추계학술대회
개최지
라카이 샌드파인 리조트

ScholarWorks@한양대학교

(04763) 서울특별시 성동구 왕십리로 222 Tel. +82-2-2220-1370 +82-2-2220-1366

COPYRIGHT © 한양대학교 All Rights Reserved.

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.

You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.